Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
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چکیده
منابع مشابه
Ethanol Microsensors with a Readout Circuit Manufactured Using the CMOS-MEMS Technique
The design and fabrication of an ethanol microsensor integrated with a readout circuit on-a-chip using the complementary metal oxide semiconductor (CMOS)-microelectro -mechanical system (MEMS) technique are investigated. The ethanol sensor is made up of a heater, a sensitive film and interdigitated electrodes. The sensitive film is tin dioxide that is prepared by the sol-gel method. The heater ...
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ژورنال
عنوان ژورنال: Sensors
سال: 2015
ISSN: 1424-8220
DOI: 10.3390/s150101623